Canon announced the “Lithography Plus” solution platform, which provides Canon support expertise to help increase productivity for semiconductor lithography systems. | Whuff News

Tokyo, September 5, 2022—Canon Inc. announced today that the company will begin offering “Lithography Plus.”1“Solution Platform for Semiconductor Lithography Systems. The system incorporates Canon’s more than 50 years of semiconductor lithography system support and company-wide resources to maximize support efficiency and deliver and implement optimized system processes.”

Lithography plus system concept image

Lithography plus system concept image

System control unit concept image

System control unit concept image

The FPA-6300ES6a KrF semiconductor lithography system

FPA-6300ES6a KrF
Semiconductor lithography system

Canon supports a wide range of KrF semiconductor lithography systems as well as i-line steppers and has a long history of providing user support for these systems. Lithography Plus leverages this accumulated knowledge and data as a solution platform that improves both support operations and operational efficiency of lithography systems, thereby contributing to increased productivity for system users.

Canon Lithography Plus System includes functions that analyze the status of lithography systems, results of routine maintenance, causes of system downtime and other useful information. System users can use this data to easily create system operation plans during maintenance or parts replacement, thereby enabling appropriate maintenance. Moreover, the dash board functionality helps to further increase the efficiency of user’s maintenance work by providing an overview of all semiconductor lithography systems in their working area.

The Anomaly Detection function monitors the operating system status and displays anomalies and potential problems to prevent unexpected system shutdowns. In addition, the automatic recovery function helps to restart system operations. When automatic restore is not possible, system restore instructions are provided in an easy-to-understand manner for operators, thereby facilitating smooth recovery. Moreover, through the remote assistance service, system status can be shared with Canon expert engineers, which helps them to better understand the situation and provide detailed assistance during customer support calls.

The process solution functionality provides a comprehensive set of successful lithography system optimization recipes that Canon has accumulated over its long history in the business. Providing automatic and optimized “recipes2To configure settings such as precise alignment accuracy and line width control, it enables even newly implemented semiconductor lithography processes to realize high production volumes.3Thus, it increases system productivity. Lithography Plus also has the ability to interface with APC.4 and other process tools to enable greater integration with manufacturing management systems.

  • 1For details, please visit:
  • 2Manufacturing conditions vary according to the type of equipment and manufacturing process.
  • 3Proportion of defective products in the manufacturing process of properly manufactured products.
  • 4Advanced process control. Refers to the use of processing parameters optimized for individual lots. The results of past processes are applied and used as inputs to process equipment to predict values ​​of front-end processes, advanced statistical and analytical techniques to improve process control parameters and output quality.

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